MEMS activities at METU have been started in 1995 within Electrical and Electronics Engineering Department, and since then, a number of research projects have been conducted that are supported by various national and international institutions, including TUBITAK, State Planning Organization (DPT), MSB Ar-Ge, SSM, European Union 6th and 7th Framework Programmes, NATO SfS Programme, NSF, TOFAS, and Intel.
